TY  - RPRT
TI  - Atomic Precision Processing of New Materials for Frontier Microelectronic Applications in High Performance Computing and Artificial Intelligence
AU  - Yevgeny Raitses
AU  - Sebastian Engelmann
AU  - Shahid Rauf
AU  - Igor Kaganovich
AU  - Jonathan Menard
AU  - Steven Cowely
PY  - 2020
UR  - https://arxiv.org/abs/2009.03109
ID  - 2009.03109
ER  -