@misc{indiciaeaf7884b33849,
  title = {Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors},
  author = {Shu Zhang and Guang-Yu Sun and Volčokas Arnas and Guan-Jun Zhang and An-Bang Sun},
  year = {2021},
  doi = {10.1088/1361-6595/abf321},
  url = {https://arxiv.org/abs/2009.07097},
  note = {Source identifier: 2009.07097}
}