TY  - RPRT
TI  - Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors
AU  - Shu Zhang
AU  - Guang-Yu Sun
AU  - Volčokas Arnas
AU  - Guan-Jun Zhang
AU  - An-Bang Sun
PY  - 2021
DO  - 10.1088/1361-6595/abf321
UR  - https://arxiv.org/abs/2009.07097
ID  - 2009.07097
ER  -