@misc{indiciae90b0a1eddadd,
  title = {Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation},
  author = {Elena Cianci and Daniele Nazzari and Gabriele Seguini and Michele Perego},
  year = {2020},
  doi = {10.1002/admi.201801016},
  url = {https://arxiv.org/abs/2009.08344},
  note = {Source identifier: 2009.08344}
}