TY  - RPRT
TI  - Trimethylaluminum Diffusion in PMMA Thin Films during Sequential Infiltration Synthesis: In Situ Dynamic Spectroscopic Ellipsometric Investigation
AU  - Elena Cianci
AU  - Daniele Nazzari
AU  - Gabriele Seguini
AU  - Michele Perego
PY  - 2020
DO  - 10.1002/admi.201801016
UR  - https://arxiv.org/abs/2009.08344
ID  - 2009.08344
ER  -