@misc{indiciaef9264f194ab7,
  title = {Isotopic enrichment of silicon by high fluence \$\textasciicircum{}\{28\}\$Si\$\textasciicircum{}-\$ ion implantation},
  author = {D. Holmes and B. C. Johnson and C. Chua and B. Voisin and S. Kocsis and S. Rubanov and S. G. Robson and J. C. McCallum and D. R McCamey and S. Rogge and D. N. Jamieson},
  year = {2020},
  doi = {10.1103/physrevmaterials.5.014601},
  url = {https://arxiv.org/abs/2009.08594},
  note = {Source identifier: 2009.08594}
}