@misc{indiciaec4b572c46e8e,
  title = {Cryogenic cleaning of tin-drop contamination on surfaces relevant for extreme ultraviolet light collection},
  author = {Norbert Böwering and Christian Meier},
  year = {2020},
  doi = {10.1116/6.0000501},
  url = {https://arxiv.org/abs/2009.10393},
  note = {Source identifier: 2009.10393}
}