@misc{indiciaea22ff3390b36,
  title = {Fabrication of three-dimensional high-aspect-ratio structures by oblique-incidence Talbot lithography},
  author = {Ryu Ezaki and Naoki Ura and Tsutomu Uenohara and Yasuhiro Mizutani and Yoshihiko Makiura and Yasuhiro Takaya},
  year = {2020},
  doi = {10.1364/oe.410965},
  url = {https://arxiv.org/abs/2009.11476},
  note = {Source identifier: 2009.11476}
}