TY  - RPRT
TI  - Fabrication of three-dimensional high-aspect-ratio structures by oblique-incidence Talbot lithography
AU  - Ryu Ezaki
AU  - Naoki Ura
AU  - Tsutomu Uenohara
AU  - Yasuhiro Mizutani
AU  - Yoshihiko Makiura
AU  - Yasuhiro Takaya
PY  - 2020
DO  - 10.1364/oe.410965
UR  - https://arxiv.org/abs/2009.11476
ID  - 2009.11476
ER  -