@misc{indiciae29006c24bb03, title = {Offcut-related step-flow and growth rate enhancement during (100) \$β\$-Ga2O3 homoepitaxy by metal-exchange catalyzed molecular beam epitaxy (MEXCAT-MBE)}, author = {Piero Mazzolini and Andreas Falkenstein and Zbigniew Galazka and Manfred Martin and Oliver Bierwagen}, year = {2020}, doi = {10.1063/5.0031300}, url = {https://arxiv.org/abs/2010.00367}, note = {Source identifier: 2010.00367} }