TY - RPRT TI - Offcut-related step-flow and growth rate enhancement during (100) $β$-Ga2O3 homoepitaxy by metal-exchange catalyzed molecular beam epitaxy (MEXCAT-MBE) AU - Piero Mazzolini AU - Andreas Falkenstein AU - Zbigniew Galazka AU - Manfred Martin AU - Oliver Bierwagen PY - 2020 DO - 10.1063/5.0031300 UR - https://arxiv.org/abs/2010.00367 ID - 2010.00367 ER -