@misc{indiciaec7d77a331168,
  title = {Surface temperature analysis of a hot titanium target in argon magnetron sputtering system},
  author = {Haci Ahmedov and Aleksandr A. Kozin and Viktor I. Shapovalov and Aygerim N. Djandalieva and Arif Demir and Beste Korutlu},
  year = {2020},
  url = {https://arxiv.org/abs/2010.01957},
  note = {Source identifier: 2010.01957}
}