@misc{indiciae20aa654578c1,
  title = {Structural evolution of the elastic properties in nano-structured AlN film},
  author = {Rafael J. Jimenez-Rioboo and Valerie Brien and Philippe Pigeat},
  year = {2020},
  doi = {10.1007/s10853-009-3944-3},
  url = {https://arxiv.org/abs/2010.02526},
  note = {Source identifier: 2010.02526}
}