TY  - RPRT
TI  - Structural evolution of the elastic properties in nano-structured AlN film
AU  - Rafael J. Jimenez-Rioboo
AU  - Valerie Brien
AU  - Philippe Pigeat
PY  - 2020
DO  - 10.1007/s10853-009-3944-3
UR  - https://arxiv.org/abs/2010.02526
ID  - 2010.02526
ER  -