@misc{indiciae78c094dc05f6, title = {Ferroelectricity in AlScN: Switching, Imprint and sub-150 nm Films}, author = {Simon Fichtner and Georg Schönweger and Tom-Niklas Kreutzer and Fabian Lofink and Adrian Petraru and Hermann Kohlstedt and Bernhard Wagner}, year = {2020}, url = {https://arxiv.org/abs/2010.05705}, note = {Source identifier: 2010.05705} }