@misc{indiciaecc237cb637c7,
  title = {How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation},
  author = {Frank Volmer and Inga Seidler and Timo Bisswanger and Jhih-Sian Tu and Lars R. Schreiber and Christoph Stampfer and Bernd Beschoten},
  year = {2021},
  doi = {10.1088/1361-6463/abe89b},
  url = {https://arxiv.org/abs/2010.06459},
  note = {Source identifier: 2010.06459}
}