TY  - RPRT
TI  - How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
AU  - Frank Volmer
AU  - Inga Seidler
AU  - Timo Bisswanger
AU  - Jhih-Sian Tu
AU  - Lars R. Schreiber
AU  - Christoph Stampfer
AU  - Bernd Beschoten
PY  - 2021
DO  - 10.1088/1361-6463/abe89b
UR  - https://arxiv.org/abs/2010.06459
ID  - 2010.06459
ER  -