@misc{indiciaecf8d369e44a9,
  title = {An upgraded ultra-high vacuum magnetron-sputtering system for high-versatility and software-controlled deposition},
  author = {Arnaud le Febvrier and Ludvig Landalv and Thomas Liersch and David Sandmark and Per Sandstrom and Per Eklund},
  year = {2021},
  doi = {10.1016/j.vacuum.2021.110137},
  url = {https://arxiv.org/abs/2010.08411},
  note = {Source identifier: 2010.08411}
}