TY  - RPRT
TI  - An upgraded ultra-high vacuum magnetron-sputtering system for high-versatility and software-controlled deposition
AU  - Arnaud le Febvrier
AU  - Ludvig Landalv
AU  - Thomas Liersch
AU  - David Sandmark
AU  - Per Sandstrom
AU  - Per Eklund
PY  - 2021
DO  - 10.1016/j.vacuum.2021.110137
UR  - https://arxiv.org/abs/2010.08411
ID  - 2010.08411
ER  -