@misc{indiciaea5a4e45be5ed, title = {Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas I: triple-frequency discharges}, author = {Hao Zheng and Jidun Wu and Qilu Cao and Jiaojiao Zhang and Xiaojiang Huang}, year = {2020}, url = {https://arxiv.org/abs/2010.10714}, note = {Source identifier: 2010.10714} }