TY  - RPRT
TI  - Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas I: triple-frequency discharges
AU  - Hao Zheng
AU  - Jidun Wu
AU  - Qilu Cao
AU  - Jiaojiao Zhang
AU  - Xiaojiang Huang
PY  - 2020
UR  - https://arxiv.org/abs/2010.10714
ID  - 2010.10714
ER  -