TY - RPRT TI - Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas II: two-dimensional distributions AU - Jidun Wu AU - Hao Zheng AU - Yanfei Wang AU - Fengzhu Zhou AU - Xiaojiang Huang PY - 2020 UR - https://arxiv.org/abs/2010.10720 ID - 2010.10720 ER -