@misc{indiciaea69a32233cbd, title = {Ultrahigh Vacuum Packaging and Surface Cleaning for Quantum Devices}, author = {M. Mergenthaler and S. Paredes and P. Müller and C. Müller and S. Filipp and M. Sandberg and J. Hertzberg and V. P. Adiga and M. Brink and A. Fuhrer}, year = {2020}, doi = {10.1063/5.0034574}, url = {https://arxiv.org/abs/2010.12090}, note = {Source identifier: 2010.12090} }