TY - RPRT TI - Structural, chemical and optical characterizations of nanocrystallized AlN:Er thin films prepared by r.f. magnetron sputtering AU - Valerie Brien AU - P. Miska AU - H. Rinnert AU - D. Genève AU - P. Pigeat PY - 2020 DO - 10.1016/j.mseb.2007.07.018 UR - https://arxiv.org/abs/2010.13414 ID - 2010.13414 ER -