@misc{indiciaec29291f67859, title = {Site-specific plan-view TEM lamella preparation of pristine surfaces with a large field of view}, author = {Tobias Meyer and Tobias Westphal and Birte Kressdorf and Ulrich Ross and Christian Jooss and Michael Seibt}, year = {2020}, doi = {10.1016/j.ultramic.2021.113320}, url = {https://arxiv.org/abs/2011.00614}, note = {Source identifier: 2011.00614} }