@misc{indiciaea18d325cbdee,
  title = {Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles},
  author = {Raul Zazo and Javier Solis and José A. Sanchez-Gil and Rocio Ariza and Rosalia Serna and Jan Siegel},
  year = {2020},
  doi = {10.1016/j.apsusc.2020.146307},
  url = {https://arxiv.org/abs/2011.01866},
  note = {Source identifier: 2011.01866}
}