TY  - RPRT
TI  - Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles
AU  - Raul Zazo
AU  - Javier Solis
AU  - José A. Sanchez-Gil
AU  - Rocio Ariza
AU  - Rosalia Serna
AU  - Jan Siegel
PY  - 2020
DO  - 10.1016/j.apsusc.2020.146307
UR  - https://arxiv.org/abs/2011.01866
ID  - 2011.01866
ER  -