@misc{indiciae5a2f977025aa,
  title = {Development of Multi-Layer Fabrication Process for SFQ Large Scale Integrated Digital Circuits},
  author = {Liliang Ying and Xue Zhang and Minghui Niu and Jie Ren and Wei Peng and Masaaki Meazawa and Zhen Wang},
  year = {2020},
  doi = {10.1109/tasc.2021.3065277},
  url = {https://arxiv.org/abs/2011.06272},
  note = {Source identifier: 2011.06272}
}