TY  - RPRT
TI  - Development of Multi-Layer Fabrication Process for SFQ Large Scale Integrated Digital Circuits
AU  - Liliang Ying
AU  - Xue Zhang
AU  - Minghui Niu
AU  - Jie Ren
AU  - Wei Peng
AU  - Masaaki Meazawa
AU  - Zhen Wang
PY  - 2020
DO  - 10.1109/tasc.2021.3065277
UR  - https://arxiv.org/abs/2011.06272
ID  - 2011.06272
ER  -