@misc{indiciae3e40161bc3c0,
  title = {Profilometry and stress analysis of suspended nanostructured thin films},
  author = {Ali Akbar Darki and Alexios Parthenopoulos and Jens Vinge Nygaard and Aurélien Dantan},
  year = {2020},
  doi = {10.1063/5.0037406},
  url = {https://arxiv.org/abs/2011.06875},
  note = {Source identifier: 2011.06875}
}