TY  - RPRT
TI  - Profilometry and stress analysis of suspended nanostructured thin films
AU  - Ali Akbar Darki
AU  - Alexios Parthenopoulos
AU  - Jens Vinge Nygaard
AU  - Aurélien Dantan
PY  - 2020
DO  - 10.1063/5.0037406
UR  - https://arxiv.org/abs/2011.06875
ID  - 2011.06875
ER  -