@misc{indiciae66715b017807,
  title = {Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances},
  author = {André G. Steckel and Henrik Bruus and Paul Muralt and Ramin Matloub},
  year = {2020},
  doi = {10.1103/physrevapplied.16.014014},
  url = {https://arxiv.org/abs/2011.08125},
  note = {Source identifier: 2011.08125}
}