TY  - RPRT
TI  - Fabrication, characterization, and simulation of glass devices with AlN-thin-film-transducers for excitation of ultrasound resonances
AU  - André G. Steckel
AU  - Henrik Bruus
AU  - Paul Muralt
AU  - Ramin Matloub
PY  - 2020
DO  - 10.1103/physrevapplied.16.014014
UR  - https://arxiv.org/abs/2011.08125
ID  - 2011.08125
ER  -