@misc{indiciae3bde9137740e, title = {Precise nanoscale temperature mapping in operational microelectronic devices by use of a phase change material}, author = {Qilong Cheng and Sukumar Rajauria and Erhard Schreck and Robert Smith and Na Wang and Jim Reiner and Qing Dai and David Bogy}, year = {2020}, url = {https://arxiv.org/abs/2011.10108}, note = {Source identifier: 2011.10108} }