TY  - RPRT
TI  - Precise nanoscale temperature mapping in operational microelectronic devices by use of a phase change material
AU  - Qilong Cheng
AU  - Sukumar Rajauria
AU  - Erhard Schreck
AU  - Robert Smith
AU  - Na Wang
AU  - Jim Reiner
AU  - Qing Dai
AU  - David Bogy
PY  - 2020
UR  - https://arxiv.org/abs/2011.10108
ID  - 2011.10108
ER  -