@misc{indiciae58b0b2373107,
  title = {Low microwave loss in deposited Si and Ge thin-film dielectrics at single-photon power and low temperatures},
  author = {Cameron J. Kopas and Justin Gonzales and Shengke Zhang and Daniel R. Queen and Brian Wagner and Mac Robinson and James Huffman and Nate Newman},
  year = {2021},
  doi = {10.1063/5.0041525},
  url = {https://arxiv.org/abs/2011.10155},
  note = {Source identifier: 2011.10155}
}