TY  - RPRT
TI  - Low microwave loss in deposited Si and Ge thin-film dielectrics at single-photon power and low temperatures
AU  - Cameron J. Kopas
AU  - Justin Gonzales
AU  - Shengke Zhang
AU  - Daniel R. Queen
AU  - Brian Wagner
AU  - Mac Robinson
AU  - James Huffman
AU  - Nate Newman
PY  - 2021
DO  - 10.1063/5.0041525
UR  - https://arxiv.org/abs/2011.10155
ID  - 2011.10155
ER  -