TY - RPRT TI - Processing slightly resolved ro-vibrational spectra during chemical vapor deposition of carbon materials: machine learning approach for plasma thermometry AU - R. R. Ismagilov AU - I. P. Kudarenko AU - S. A. Malykhin AU - S. D. Babin AU - A. B. Loginov AU - V. I. Kleshch AU - A. N. Obraztsov PY - 2020 UR - https://arxiv.org/abs/2011.12647 ID - 2011.12647 ER -