@misc{indiciae6ffbf04c91f1,
  title = {X-ray verification of sol-gel resist shrinkage in substrate-conformal imprint lithography for a replicated blazed reflection grating},
  author = {Jake A. McCoy and Marc A. Verschuuren and Drew M. Miles and Randall L. McEntaffer},
  year = {2020},
  doi = {10.1364/osac.402405},
  url = {https://arxiv.org/abs/2011.14771},
  note = {Source identifier: 2011.14771}
}