TY  - RPRT
TI  - X-ray verification of sol-gel resist shrinkage in substrate-conformal imprint lithography for a replicated blazed reflection grating
AU  - Jake A. McCoy
AU  - Marc A. Verschuuren
AU  - Drew M. Miles
AU  - Randall L. McEntaffer
PY  - 2020
DO  - 10.1364/osac.402405
UR  - https://arxiv.org/abs/2011.14771
ID  - 2011.14771
ER  -