@misc{indiciaecaa78072dc6a, title = {Ultra-shallow junction electrodes in low-loss silicon micro-ring resonators}, author = {Bin-Bin Xu and Gabriele G. de Boo and Brett C. Johnson and Miloš Rančić and Alvaro Casas Bedoya and Blair Morrison and Jeffrey C. McCallum and Benjamin J. Eggleton and Matthew J. Sellars and Chunming Yin and Sven Rogge}, year = {2020}, doi = {10.1103/physrevapplied.15.044014}, url = {https://arxiv.org/abs/2011.14792}, note = {Source identifier: 2011.14792} }