@misc{indiciaeae54fa7d78f2,
  title = {Laser Processing For 3D Junctionless Transistor Fabrication},
  author = {D. Bosch and P. Acosta Alba and S. Kerdiles and V. Benevent and C. Perrot and J. Lassarre and J. Richy and J. Lacord and B. Sklenard and L. Brunet and P. Batude and C. Fenouillet-Beranger and D. Lattard and J. P. Colinge and F. Balestra and F. Andrieu},
  year = {2020},
  url = {https://arxiv.org/abs/2011.15061},
  note = {Source identifier: 2011.15061}
}