@misc{indiciae87d9839b41f9,
  title = {Unmasking the resolution\$-\$throughput tradespace of focused-ion-beam machining},
  author = {Andrew C. Madison and John S. Villarrubia and Kuo-Tang Liao and Craig R. Copeland and Joshua Schumacher and Kerry Siebein and B. Robert Ilic and J. Alexander Liddle and Samuel M. Stavis},
  year = {2022},
  doi = {10.1002/adfm.202111840},
  url = {https://arxiv.org/abs/2012.01678},
  note = {Source identifier: 2012.01678}
}