@misc{indiciae8d712a041a2c,
  title = {An enhanced operating regime for high frequency capacitive discharges},
  author = {Sanket Patil and Sarveshwar Sharma and Sudip Sengupta and Abhijit Sen and Igor Kaganovich},
  year = {2020},
  url = {https://arxiv.org/abs/2012.02752},
  note = {Source identifier: 2012.02752}
}