TY  - RPRT
TI  - An enhanced operating regime for high frequency capacitive discharges
AU  - Sanket Patil
AU  - Sarveshwar Sharma
AU  - Sudip Sengupta
AU  - Abhijit Sen
AU  - Igor Kaganovich
PY  - 2020
UR  - https://arxiv.org/abs/2012.02752
ID  - 2012.02752
ER  -