@misc{indiciae569720654a39,
  title = {Plasma-assisted Discharges and Charging in EUV-induced Plasma},
  author = {Mark van de Kerkhof and Andrei M. Yakunin and Vladimir Kvon and Selwyn Cats and Luuk Heijmans and Manis Chaudhuri and Dmitry Asthakov},
  year = {2020},
  url = {https://arxiv.org/abs/2012.03027},
  note = {Source identifier: 2012.03027}
}