@misc{indiciaecd80cf12bec1,
  title = {Precision of silicon oxynitride refractive-index profile retrieval using optical characterization},
  author = {Vít Kanclíř and Jan Václavík and Karel Žídek},
  year = {2020},
  doi = {10.12693/aphyspola.140.215},
  url = {https://arxiv.org/abs/2012.04260},
  note = {Source identifier: 2012.04260}
}