TY  - RPRT
TI  - Precision of silicon oxynitride refractive-index profile retrieval using optical characterization
AU  - Vít Kanclíř
AU  - Jan Václavík
AU  - Karel Žídek
PY  - 2020
DO  - 10.12693/aphyspola.140.215
UR  - https://arxiv.org/abs/2012.04260
ID  - 2012.04260
ER  -