@misc{indiciaea554ddc960fa,
  title = {Toward volume manufacturing of high-performance soft x-ray critical-angle transmission gratings},
  author = {Ralf K. Heilmann and Alexander R. Bruccoleri and Jungki Song and Matthew T. Cook and James A. Gregory and Renee D. Lambert and Dimitri A. Shapiro and Douglas J. Young and Miranda Bradshaw and Vadim Burwitz and Gisela D. Hartner and Andreas Langmeier and Randall K. Smith and Mark L. Schattenburg},
  year = {2020},
  doi = {10.1117/12.2562388},
  url = {https://arxiv.org/abs/2012.04607},
  note = {Source identifier: 2012.04607}
}