@misc{indiciae2040a611508c,
  title = {Characterization of low-loss hydrogenated amorphous silicon films for superconducting resonators},
  author = {Bruno T. Buijtendorp and Juan Bueno and David J. Thoen and Vignesh Murugesan and Paolo M. Sberna and Jochem J. A. Baselmans and Sten Vollebregt and Akira Endo},
  year = {2020},
  doi = {10.1117/1.jatis.8.2.028006},
  url = {https://arxiv.org/abs/2012.07692},
  note = {Source identifier: 2012.07692}
}